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基于PLC的大范围运动与高精度对准控制
引用本文:李庆涛,徐德,刘云,汪建华. 基于PLC的大范围运动与高精度对准控制[J]. 制造业自动化, 2007, 29(6): 48-52,67
作者姓名:李庆涛  徐德  刘云  汪建华
作者单位:1. 中国科学院自动化研究所复杂系统与智能科学实验室,北京,100080;中国科学院研究生院,北京,100080
2. 中国科学院自动化研究所复杂系统与智能科学实验室,北京,100080
基金项目:国家863计划资助项目(2004AA420040-2).
摘    要:针对掩模版传输过程中的大范围运动与高精度对准这两个关键问题,本文采用基于PLC的全闭环位置控制方法,设计了用于掩模版传输和对准的机械手控制系统。对于大范围运动,利用旋转编码器和光栅尺检测机械手的速度和位移,构成三闭环控制系统。对于高精度对准,利用四象限探测器检测掩模版位置与姿态偏差,构成四闭环控制系统。实验结果表明,利用本文控制系统,机械手在大范围传输和高精度对准时的速度和精度都可以满足生产要求。

关 键 词:大范围传输 对准 运动控制器 全闭环位置控制 四象限探测器
文章编号:1009-0134(2007)06-0048-06
修稿时间:2006-12-01

Large range motion and high-precision alignment control based on PLC
LI Qing-tao,XU De,LIU Yun,WANG Jian-hua. Large range motion and high-precision alignment control based on PLC[J]. Manufacturing Automation, 2007, 29(6): 48-52,67
Authors:LI Qing-tao  XU De  LIU Yun  WANG Jian-hua
Affiliation:1. Key Laboratory of Complex Systems and Intelligent Science, Institute of Automation, Chinese Academy of Sciences, Beijing 100080, China; 2. Graduate School of the Chinese Academy of Sciences, Beijing 100080, China
Abstract:Large range motion and high-precision alignment are two key problems in the transportation of mask. Aiming at the two problems, full closed-loop position control technique based on PLC is applied in this paper, and a set of manipulator control system is specially designed to transport and align mask-plate. When it's in large-scale movement, optical encoder and optical linear encoder are used to measure speed and displacement, so a closed-loop control system with three loops is composed. When it's in high-precision alignment, two four-quadrant detectors are used to measure position and pose deviation, and then a closed- loop control system with four loops is composed accordingly. Experiments show that the speed and precision when the manipulator is in large-scale transportation and high-precision alignment can meet the demands from manufacture
Keywords:Large-scale transportation   alignment   motion controller   full closed-loop position control   four-quadrant detector
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