高精度时栅位移传感器研究

分析了传统位移传感器的优点与不足，讨论了时空转换思想、时空坐标转换方法与时栅位移传感器原理。通过高精度时栅位移传感器的研制过程，介绍了单齿式、差频式、场式和混合式几种时栅的原理结构及其分别达到的分辨率和精度指标，最终通过鉴定的场式时栅达到了0.1″的分辨率和±0.8″的精度。还介绍了谐波修正法思想，目的在于把傅里叶变换用于传感器诞生之前的参数设计和制作过程中的误差修正，而不只是在其后的误差分解和分析。反映出时栅作为一种智能传感器所体现的技术优势和谐波修正法的实用效果，而最终目标是不依赖精密机械加工或不用刻线尺而实现精密位移测量。

RESEARCH ON HIGH-PRECISION TIME-GRATING DISPLACEMENT SENSOR

The advantage and disadvantage of traditional displacement sensors are analyzed. The time space transform- ation idea, the time space transformation method and the principle of time grating sensor are discussed. By researching the high precision time grating displacement sensor, the prin- ciple, structure, resolution and accuracy of the single tooth type, frequency difference type, field type and composite type time grating are introduced. The time grating displacement sensor that has passed through the appraisal gets a 0.1″resolution and ±0.8″accuracy. Meanwhile a harmonic wave correcting idea is introduced. Besides the error decomposing and analysis of sensor, FFT is used to design parameter and correct error before and during the sensor is made. The technical advantages of time grating as a smart sensor and practical effect of harmonic wave correcting are obvious. The purpose is to realize high-precision measurement without the requirement of high precision machining and high precision scale ruler.