静电场耦合微机电系统的动态模型

研究静电场耦合微机电系统（Ｍｉｃｒｏ ｅｌｅｃｔｒｏｍｅｃｈａｎｉｃａｌ ｓｙｓｔｅｍｓ，简记为 ＭＥＭＳ）的动态模型问题。首先，给出了耦合静电场的输入／输出两端点对模型，讨论了微机电系统的独立变量对的选择与分析方法。其次，叙述了所研制的典型微结构，包括ＳＥＭ照片、有限元分析的振动模态，以及简化模型。第三，分析了ＭＥＭＳ传感器系统的静电场与静电力表达式、动力学方程，以及开环和闭环传递函数。第四，给出了ＭＥＭＳ传感器系统的实测频率特性和等效模型参数，并且根据以上分析和试验结果，提出了几点有重要意义的结论。

DYNAMIC MODELS OF MEMS WITH ELECTROSTATIC FIELD COUPLING

Dynamic model issues of micro electromechanical systems (MEMS) with electrostatic field coupling are studied. Firstly, input/output model with two terminal pairs of electros-tatic field is given. Selection and analysis method of independent variable pairs for MEMS are discussed. Secondly, two typical micro structures, which are developed in our lab, including SEM photos, vibration modals of finite element analysis, and simplified model, are described. Thirdly, The electrostatic field and its force expressions, dynamic equations, and open loop & close loop transfer functions of MEMS sensors are analyzed. Fourthly, The frequency responses and equivalent model para meters obtained from tests are given, and some significant conclusions are presented based on the results of analysis and tests mentioned above.