基于压电驱动器的微动平台开环精密定位控制研究

针对压电驱动器的非线性和迟滞特性,首先介绍了一种基于迭代学习控制的压电驱动器的快速电压/位移线性化方法,利用此方法所得的线性化数据对二维微动平台进行了开环精密定位控制;然后介绍了采用改进的Preisach模型对压电驱动器的迟滞特性进行建模的方法,并利用此模型也进行了开环精密定位控制研究。试验结果表明,两种方法均能达到亚微米级的开环定位精度,且前者定位精度稍优于后者,但是当控制序列发生转折时,前者必须先回到零电压或者饱和控制电压,才能进行下一次定位控制,而后者可以实现任意序列的连续控制。

RESEARCH ON OPEN-LOOP PRECISION POSITIONING CONTROL OF A MICRODISPLACEMENT PLATFORM BASED ON PIEZOELECTRIC ACTUATORS

Aiming at the non-linearity and hysteresis of a piezoelectric actuator, a novel and fast voltage/displacement linear method based on iterative learning control is presented firstly. Then linear data are used in the open-loop precision positioning control. The second method uses the modified preisach model to model the hystersis, and also using the preisach model to perform the research on the open-loop precision positioning control is introduced. Experimental results show that both methods can reach accuracy of sub-micron and the first is better than the second in positioning accuracy. When the control series switch, for the first the input must return to zero voltage or saturation control voltage and carry out next positioning control, while the second can realize the continuous control of arbitrary series.