| 激光直线度干涉仪浅析 |
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| 引用本文： | 舒阳.激光直线度干涉仪浅析[J].工具技术,2010,44(6):113-116. |
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| 作者姓名： | 舒阳 |
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| 作者单位： | 成都工具研究所 |
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| 摘 要： | 激光直线度干涉仪是高精度的直线度测量仪器,其测量附件有好几种。本文重点介绍了几种激光干涉仪直线度测量附件,分析了它们的优缺点和技术特点,并提出了直线度测量容易忽视的几个问题。
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| 关 键 词： | 激光干涉仪 直线度 渥拉斯顿棱镜 双平面反射镜 |
Shallow Analysis of Laser Straightness Interferometer |
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| Shu Yang.Shallow Analysis of Laser Straightness Interferometer[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2010,44(6):113-116. |
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| Authors: | Shu Yang |
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| Affiliation: | Shu Yang Senior Engineer,Chengdu Tool Research Institute,Chengdu 610051,China |
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| Abstract: | The laser straightness interferometer is a high-precision measuring instrument.Its measurement accessories have several kinds.This paper introduces several laser interferometers straightness measurement accessories,analyzes their advantages and disadvantages and the technical characteristics,and puts forward the straightness measuring easily neglected problems. |
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| Keywords: | laser interferometer straightness wollaston prism double plane reflector |
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