高精度气动传感器的研究

介绍了气动测量中常用反射式和背压式气动传感器的设计与工作原理。理论分析出提高气动传感器灵敏度和测量范围的方法；通过对影响测量精度主要误差因素的分析，给出相应误差补偿的方法。所研制气动传感器的测量范围为55μm，分辨力为O．02μm，静态误差小于0．25μm，可适用于高精度高分辨力的非接触尺寸测量。

Study on Pneumatic Sensor with High Precision

This paper presents the design and working principle of reflective and back pressure pneumatic sensor.The meth-ods which can improve the sensitivity and measurement range of pneumatic sensor are obtained by means of theory. The affection factors of measurement precision are discussed, and the corresponding methods are adopted to compensate the errors. The mea-surement range of developed pneumatic sensor is about 55μm, with 0.02μm in resolution and less than 0.25μm in static error.Therefore, pneumatic measurement technology can be used in high accuracy, high resolution and non-contact dimension measure-ment.