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Direct measurement of TEM lamella thickness in FIB-SEM |
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| Authors: | AP CONLAN E TILLOTSON A RAKOWSKI D COOPER SJ HAIGH |
| Affiliation: | 1. Department of Materials, University of Manchester, Manchester, U.K.;2. Department of Materials, University of Manchester, Manchester, U.K.
Department of Chemistry, University of California, Irvine, California, U.S.A.;3. CEA, MINATEC, University Grenoble Alpes, Grenoble, France |
| Abstract: | |
| Keywords: | FIB image transformation quantitative analysis SEM thickness determination |