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A flexure-based mechanism and control methodology for ultra-precision turning operation
Authors:Y Tian  B Shirinzadeh  D Zhang
Affiliation:1. Robotics and Mechatronics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University, Clayton, VIC 3800, Australia;2. School of Mechanical Engineering, Tianjin University, Tianjin 300072, China;1. The State Key Laboratory of Fluid Power and Mechatronic systems, Zhejiang University, Hangzhou, ZJ 310027, China;2. School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, J.S. 210094, China;3. Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Hong Kong, China;1. Mechatronics Group, Singapore Institute of Manufacturing Technology, Singapore 638075, Singapore;2. Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Zhejiang Province 315201, China;3. School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798, Singapore;1. Key Laboratory of Mechanism Theory and Equipment Design of Ministry of Education, Tianjin University, Tianjin 30072, China;2. Robotics and Mechatronics Research Laboratory, Department of Mechanical and Aerospace Engineering, Monash University, Melbourne, VIC 3800, Australia
Abstract:This paper presents the methodology for modeling and control of a high precision flexure-based mechanism for ultra-precision turning operation. A high performance piezoelectric actuator is used to driven the flexure-based mechanism. A parallel flexure hinge mechanism is utilized to guide the moving platform and to preload the piezoelectric actuator. A high resolution capacitive sensor is used to measure the displacement of the flexure-based mechanism for closed-loop control. With consideration of the driving circuit, the dynamic model of the flexure-based mechanism has been established. The effect of the driving circuit on the dynamic response of the precision mechanism is investigated. Experimental tests have been carried out to verify the established model and the performance of the flexure-based mechanism.
Keywords:
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