Precision machining of micro tool electrodes in micro EDM for drilling array micro holes |
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| Affiliation: | 1. Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China;2. State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China;1. Shanghai Jiao Tong University, NO.800 Dongchuan Road, Shanghai 200240, China;2. Tokyo University of Agriculture and Technology,2-24-16 Nakacho, Koganei, Tokyo 184-8588, Japan;3. Dalian University of Technology,NO.2 Linggong Road, Dalian 116024, China;1. School of Mechanical & Automotive Engineering, Qingdao University of Technology, Qingdao, 266520, China;2. Key Laboratory of High Efficiency and Clean Mechanical Manufacture of Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan, 250061, China;3. School of Mechanical Engineering, Nanjing Institute of Technology, Nanjing, 211100, China;4. Department of Mechanical and Materials Engineering, University of Nebraska, Lincoln, NE, 68588, USA;1. Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei-shi, Tokyo, Japan 184-8588;2. Dalian University of Technology, 2 Lingonglu, Ganjingzi District, Dalian, China 116024;1. Faculty of Engineering of Bilbao, University of the Basque Country, Alameda de Urquijo s/n, 48013 Bilbao, Spain;2. Faculty of Technical Engineering of Bilbao, University of the Basque Country, Paseo Rafael Moreno “Pitxitxi” 3, 48013 Bilbao, Spain |
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| Abstract: | Micro electro discharge machining (micro EDM) is suitable for machining micro holes on metal alloy materials, and the micro holes can be machined even to several microns by use of wire electro discharge grinding (WEDG) of micro electrodes. However, considering practicability of micro holes <Φ100 μm in batch processing, the controllable accuracy of holes’ diameter, the consistency accuracy of repeated machining and the processing efficiency are required to be systematically improved. On the basis of conventional WEDG method, a tangential feed WEDG (TF-WEDG) method combined with on-line measurement using a charge coupled device (CCD) was proposed for improving on-line machining accuracy of micro electrodes. In TF-WEDG, removal resolution of micro-electrode diameter (the minimum thickness to be removed from micro electrode) is greatly improved by feeding the electrode along the tangential direction of wire-guide arc, and the resolution is further improved by employing negative polarity machining. Taking advantage of the high removal resolution, the precise diameter of micro-electrode can be achieved by the tangential feed of electrode to a certain position after diameter feedback of on-line measurement. Furthermore, a hybrid process was presented by combining the TF-WEDG method and a self-drilled holes method to improve the machining efficiency of micro electrodes. A cyclic alternating process of micro-electrode repeated machining and micro holes’ drilling was implemented for array micro holes with high consistency accuracy. Micro-EDM experiments were carried out for verifying the proposed methods and processes, and the experimental results show that the repeated machining accuracy of micro electrodes was less than 2 μm and the consistency accuracy of array micro holes was ±1.1 μm. |
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| Keywords: | Micro-EDM Tangential feed WEDG Micro electrode Micro hole Consistency accuracy |
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