Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry |
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Authors: | C Quan SH Wang CJ Tay |
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Affiliation: | Department of Mechanical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260, Singapore |
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Abstract: | In this paper, a flexible optical interferometer incorporated with both fast Fourier transform (FFT) and phase-shifting method is developed for three-dimensional (3D) testing of micro-components. Using light interference, microscopic optics, piezoelectric transducer (PZT) nanoscanning and a CCD camera, the proposed system can detect deformation and surface contour in the order of nanometers. An application of the proposed technique is demonstrated using two micro-components: a micro-beam in an accelerometer and a micromirror. The resulting interference fringes that are related to the deformation and surface contour are analyzed using FFT method or three-step phase-shifting method depending on the test surface features. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components. |
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Keywords: | Optical interferometry Non-destructive measurement Phase-shifting technique Fast Fourier transform (FFT) Micro-components Piezoelectric transducer (PZT) |
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