| 精密工作台误差测试系统 |
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| 引用本文： | 黄寿荣,黄家贤,等.精密工作台误差测试系统[J].光学精密工程,1995,3(1):81-86. |
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| 作者姓名： | 黄寿荣 黄家贤 |
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| 作者单位： | 东南大学电子精密机械研究室 |
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| 摘 要： | 精密工作台是超大规模集成电路制造设备中的典型机构。在实验室设备的基础上,研制了一套精密工作台误差动态测试系统。该系统采用8098单叶机实现分频、比相和误差计算。系统集数据采集和处理为一体,比相范围大,测试精度高,柔性好。使用方便。
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| 关 键 词： | 精密工作台 误差测试 比相 8098单片机 |
| 收稿时间： | 1994-07-27 |
A Testing System for Errors of Precision Working Station |
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| Huang Shourong, Huang Jiaxian, ZhaoJijun.A Testing System for Errors of Precision Working Station[J].Optics and Precision Engineering,1995,3(1):81-86. |
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| Authors: | Huang Shourong Huang Jiaxian ZhaoJijun |
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| Affiliation: | Institute of Precision Electromachinery, Southeast University, Nanjing 210096 |
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| Abstract: | The precision working station is a typical mechanism in manufacturing equipment for VLSI, its accuracy being doubtlessly of significance. Based on the equipment in the authors'laboratory, a dynamic testing system for errors of precision working station is developed, inwhich frequency-division, phase-fitting,and error-calculation are carried out by an 8098 microcontroller, and hence the data collection and the data processing are integrated.The system is flexible and easy to use with a larger range of phase-fitting and a higher measuring accuracy. |
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| Keywords: | Precision working station Phase-fitting Error-testing 8098 Microcon-troller |
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