| 化学腐蚀法制造硅微透镜列阵的实验研究 |
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| 引用本文： | 朱维安,黄友恕,钟先信,秦邻.化学腐蚀法制造硅微透镜列阵的实验研究[J].光学精密工程,1998(2). |
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| 作者姓名： | 朱维安 黄友恕 钟先信 秦邻 |
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| 作者单位： | 重庆大学光机系，电子工业部２４研究所 |
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| 摘 要： | 采用ＫＯＨ：Ｈ２Ｏ的湿法化学腐蚀Ｓｉ｛１００｝晶片获得了球面轮廓曲线十分好的微透镜，透镜直径可从几个微米到几个毫米，焦距和孔径之比ｆ／Ｄ可以从２．５到１０以上。文章给出了微透镜及列阵的实验测试结果和若干显微照片，对其设计与制造建立了半经验理论模型。最后，对球面的形成原理及异常焦斑形状作了讨论。
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| 关 键 词： | 硅微透镜 微机械 微光学 短程透镜 |
A Experimental Research on Silicon Micromirror Arrays Made by Chemical Etching |
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| ZHU Wei An,HUANG You Shu,ZHONG Xian Xin.A Experimental Research on Silicon Micromirror Arrays Made by Chemical Etching[J].Optics and Precision Engineering,1998(2). |
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| Authors: | ZHU Wei An HUANG You Shu ZHONG Xian Xin |
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| Abstract: | Micromirrors with good spherical profiles can be made on the Si{100} surface by wet chemical etching in KOH:H 2O solutions.The mirror diameters span the range from a few micrometers to several millimeters and the range of f/D's obtainable starts at about 2 5 and goes up to at least 10.Some experiment and microphotos on micromirrors array have given in the paper.A semiempirical model is developed to design the arrays.Finally some discussions on the spherical formation theory and the focal point images are given. |
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| Keywords: | Silicon micromirror Micromaching Microoptics Geodesic lenses |
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