| 一种中小口径非球面元件数控抛光技术 |
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| 引用本文： | 薛栋林,张忠玉,张学军.一种中小口径非球面元件数控抛光技术[J].光学精密工程,2005,13(2):198-204. |
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| 作者姓名： | 薛栋林 张忠玉 张学军 |
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| 作者单位： | 中国科学院,长春光学精密机械与物理研究所,光学技术研究中心,吉林,长春,130033;中国科学院,研究生院,北京,100039;中国科学院,长春光学精密机械与物理研究所,光学技术研究中心,吉林,长春,130033 |
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| 基金项目： | 国家自然科学基金资助(No.60178037) |
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| 摘 要： | 基于自主设计研制的FSGJ-3型非球面数控加工中心,针对口径φ108 mm凸非球面透镜(曲率半径R＝318 mm,k=－3),研究了非球面粗抛光工艺、精抛光工艺、抛光设备、磨料以及相关工艺参数,提出了规范的中小口径非球面加工的工艺方法和新型轮式抛光技术,实现了中小口径非球面元件的数控快速精密铣磨成型,且保证了光学零件具有较高的面形精度。抛光后元件面形精度达到0.306 λ(PV)、0.028λ(RMS) (λ=0.632 8μm)。满足了在光学系统中使用非球面零件,明显改善像质,提高光学特性,减少光学零件数目,从而简化系统结构,减小系统体积,减轻系统质量的目的。
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| 关 键 词： | 非球面透镜 轮式抛光技术 面形精度 |
| 文章编号： | 1004-924X(2005)02-0198-07 |
| 收稿时间： | 2005-01-14 |
| 修稿时间： | 2005年1月14日 |
Computer controlled polishing technology for middle or small aspheric lens |
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| XUE Dong-lin,ZHANG Zhong-yu,ZHANG Xue-jun.Computer controlled polishing technology for middle or small aspheric lens[J].Optics and Precision Engineering,2005,13(2):198-204. |
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| Authors: | XUE Dong-lin ZHANG Zhong-yu ZHANG Xue-jun |
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| Affiliation: | 1. OTRC of Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
2. Graduate School of the Chinese Academy of Sciences, Beijing 100039, China |
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| Abstract: | Based on aspheric computer controlled manufacturing center (FSGJ-3), as forφ108 mm aspheric lens (R=318 mm,k=－3), the polishing equipment, tools, abrasives and testing method used in polishing are researched. Wheeled polishing technology for the middle or small aspheric lens is introduced. It's showed that the final surface figure of the lens is 0.306λ(PV)、0.028λ(RMS) (λ=0.632 8μm). Discussing and analyzing the key technology of middle or small aspheric lens in detail, supplies a basic technology guarantee for aspheric optical component to reduce the size, weight and complexity of decreasing the number of surfaces required to form unaberrated images. |
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| Keywords: | aspheric lens wheeled polishing technology surface figure |
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