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相位检测法定镜自适应校正技术
引用本文:于立民,代作晓,王模昌,施志华.相位检测法定镜自适应校正技术[J].光学精密工程,2003,11(5):448-452.
作者姓名:于立民  代作晓  王模昌  施志华
作者单位:中国科学院,上海技术物理研究所,上海,200083
摘    要:为保持傅里叶变换光谱仪在动镜运动和外界震动等恶劣条件下动镜和定镜间的准直性,采用了相位检测法检测准直性误差的定镜自适应校正技术。介绍了相位检测法的基本原理和实现自适应校正的途径以及自适应校正系统的基本结构。采用高速压电倾斜镜作为驱动补偿元件,分析了相位检测精度对校正精度的影响。实验结果表明,采用自适应校正后系统干涉效率明显提高。

关 键 词:相位检测  自适应校正  准直性  高速压电倾斜镜
文章编号:1004-924X(2003)05-0448-05
收稿时间:2003/4/17
修稿时间:2003年4月17日

Adaptive alignment of fixed mirror by phase detection
YU Li-min,DAI Zuo-xiao,WANG Mo-chang,SHI Zhi-hua.Adaptive alignment of fixed mirror by phase detection[J].Optics and Precision Engineering,2003,11(5):448-452.
Authors:YU Li-min  DAI Zuo-xiao  WANG Mo-chang  SHI Zhi-hua
Affiliation:Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
Abstract:In order to keep the dynamic alignment Fourier transform spectrometer (FTS) between the moving mirror and the fixed mirror while the mirrors are moving and the temperature is changing, a phase detecting method is proposed for magnitude and tilt direction. The structure of dynamic alignment system and the basic principle of the phase detection are discussed. Fast steering mirror is adopted in the self-alignment system. The features and structure of the fast steering mirror are detailed. Alignment results show that dynamic alignment has obvious effects on performance.
Keywords:phase detection  adaptive alignment  collimation  piezoelectric fast steering mirror
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