基于全场条纹反射的镜面物体三维面形测量综述

随着集成电路、汽车行业、先进制造和天文学的发展,条纹反射术被广泛应用于测量镜面物体的三维形貌。条纹反射术通过反射条纹图中的相位信息计算被测镜面物体的局部斜率或深度信息来恢复物体的三维形貌。为全面了解条纹反射术研究的最新进展,本文综述了条纹反射的基本原理、反射条纹产生的方式、相位的计算方法、系统参数的标定和斜率积分获得深度数据,同时介绍了不依赖积分过程的直接条纹反射术。通过具体的应用和实例,指出了条纹反射术的优缺点。最后,指出了条纹反射术未来的研究方向。该综述文章为深入研究镜面反射物体的三维面形测量提供了有益的参考。

Review on three-dimensional surface measurements of specular objects based on full-field fringe reflection

With the fast development of integrated circuits, the automotive industry, advanced manufacturing, and astronomy, fringe reflection profilometry (FRP, also called deflectometry) is widely used to measure the three-dimensional (3D) shapes of specular surfaces. FRP reconstructs the 3D shape of an object by calculating the local gradient or depth information of the specular surface using the phase information in the reflected fringe patterns. In order to gain a complete understanding of the recent developments in FRP, this paper reviews the basic principles of fringe reflection, generation of fringe patterns, phase calculation methods, calibration of system parameters, and slope integration to obtain depth data. The paper also introduces direct FRP without the integration procedure. The merits and demerits of FRP are presented through applications and examples. Finally, the future research directions of FRP are highlighted. This review paper provides a useful reference for understanding and studying the 3D surface measurements of specular reflection objects.