基于光栅的快速精确图像拼接

为了提高IC芯片视觉检测中图像拼接的速度和精度,提出一种基于精密光栅运动系统的快速精确图像拼接技术。提出自标定技术解决了传统标定受标准件加工尺寸精度和光强影响的问题,提高了标定的准确度并降低了成本。在准确标定基础上,建立了基于光栅精确定位的拼接模型。实验表明,该方法拼接精度高,拼接平均误差在0.4 μm以内,2 σ为0.872 μm,达到亚像素级精度,而且拼接速度快,两幅图像拼接时间约为10 ms。

Fast and precision image mosaic based on grating

In order to improve the speed and precision of image mosaic for IC vision inspection, a fast and accurate image mosaic technique based on precision grating measurement system was presented. The self-calibration method can solve the problem of conventional calibration affected by the manufacturing precision of standard unit and light intensity, and can increase the calibration accuracy and decrease the cost. After accurate calibration, the image mosaic model based on grating precision location was established. The experiments demonstrate that this system has high image mosaic precision, average error within 0.4 μm, and 0.872 μm in 2σ, which is up to sub-pixel precision; also the system has high mosaic speed,the time of two image mosaic is about 10 ms.