全柔性机构与MEMS

柔性机构是一种新型机构。首先描述了柔性机构和全柔性机构的概念及特点,论述了它们与MEMS之间的关系。然后详细介绍了全柔性机构在MEMS领域内包括微装配、微操作等应用背景下的状况及前景。最后就对全柔性机构研究中的几个关键技术问题如机构的分析、设计及加工,柔性铰链的选择与设计,驱动器的选择及设计等进行了探讨。

Fully compliant mechanisms and MEMS

Compliant mechanisms are devices that deliver a desired motion by undergoing elastic deformation. A typical compliant mechanisms is called fully compliant mechanism. Owing to their serveral significant advantages relative to conventional mechanisms such as no backlash and friction, and no assembly, compliant mechanisms especially fully compliant mechanisms have been applied to many fields especially in MEMS. So research on compliant mechanisms and fully compliant mechanisms has been a hot issue in recent years. This paper firstly describes their concepts, characteristics and applications in MEMS. Finally several critical techniques and tendencies such as the analysis, design and fabrication of fully compliant mechanisms, selection and design of flexure hinge, selection, desgin and control of the actuator etc. are discussed.