双光子三维微结构快速制备技术

建立了一种利用双光子聚合技术快速制备三维微结构的方法,并对加工分辨率进行了研究。通过对高速扫描原理的研究,提出了采用二维振镜与一维压电微移动台相结合,利用跳跃和扫描协同的运动模式,以段段扫描方式进行三维微结构加工的系统来提高其加工速度。实验制备千里马和具有木堆结构的三维光子晶体结构说明,采用上述扫描方式可使其加工速度较点点扫描方式提高10倍至1 000倍。实验结果表明,使用一定的激光功率时,其加工分辨率随曝光时间减小而显著提高,实验得到了50 nm的线宽分辨率,超过文献报道的100 nm的最高值。研究还表明,上述加工方法可实现激光三维微结构的快速制备并具有高分辨率加工的特点。

High speed two-photon laser nanofabrication of three-dimensional microstructures

A high speed fabrication technique based on two-photon polymerization is proposed for fabricating three-dimensional(3D) microstructures and its spatial fabrication resolution is also studied.Based on the study of high speed scanning,a microfabrication system assembled a set of galvano mirrors and 1D PZT stage is established,and the jump and mark moving mode is used in this fabrication system with line by line scanning mode for improving fabrication speed.Two different kind of structures(a microscaled swift horse and a log-pile photonic crystal) are fabricated in experiments.Experimental results indicate that the fabrication speed can be improved 10 or 1 000 times than that method based on point by point scanning mode.The experimental results also reveal that the spatial fabrication resolution can be improved efficiently with shortening the exposure time under a fixed laser power,and the highest spatial fabrication resolution is achieved as 50 nm,which is higher than the highest resolution of 100 nm published in literatures.With high speed and excellent spatial resolution of fabrication,this technique is a powerful tool for micro/nano parts used for photonic devices and MEMS.