| 宽带平坦型软X射线多层反射膜的设计 |
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| 引用本文： | 柯常军,王占山,郑咏梅,张铁强,曹健林,陈星旦.宽带平坦型软X射线多层反射膜的设计[J].光学精密工程,1999,7(3):19-22. |
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| 作者姓名： | 柯常军 王占山 郑咏梅 张铁强 曹健林 陈星旦 |
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| 作者单位： | 1. 吉林工业大学应用物理系,长春,130025
2. 中国科学院长春光学精密机械研究所应用光学国家重点实验室,长春,130022 |
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| 摘 要： | 提出一种宽带平坦型软X射线多层反射膜的设计方法。给出了18nm 20nm波段的设计结果,整个波段的反射率与25%的最大偏差小于1.5%.这种方法对于软X射线波段的成像、光谱分析等应用有重要意义。
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| 关 键 词： | 平坦 软X射线多层膜 随机数 评价函数 |
| 收稿时间： | 1998-11-11 |
| 修稿时间： | :1998-11-1 |
The Design of Soft X-ray Broadband and Flat Multilayer |
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| KE Chang-Jun,WANG Zhan-Shan,ZHENG Yong-Mei,ZHANG Tie-Qiang,CAO Jian-Lin,CHEN Xing-Dan.The Design of Soft X-ray Broadband and Flat Multilayer[J].Optics and Precision Engineering,1999,7(3):19-22. |
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| Authors: | KE Chang-Jun WANG Zhan-Shan ZHENG Yong-Mei ZHANG Tie-Qiang CAO Jian-Lin CHEN Xing-Dan |
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| Affiliation: | 1. Department of Applied Physics, Jilin University of Technology, Changchun 130025;2. The State Key Laboratory of Applied Optics, Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Science, Changchun 130022 |
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| Abstract: | A technique used for designing soft X ray multilayer for broadband and flat reflection has been developed. As an example, we present design result calculation in the 18nm 20nm spectral range. In the range the maximum deviation from 25% reflectivity level is less than 1.5%. It is very important for spectrum imaging and spectrum analysis. |
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| Keywords: | Flat Soft X ray multilayers Random number Merit function |
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