| 压电陶瓷管的微位移测量与非线性校正 |
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| 引用本文： | 董维杰,宋志杨,崔岩.压电陶瓷管的微位移测量与非线性校正[J].光学精密工程,2009,17(9). |
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| 作者姓名： | 董维杰 宋志杨 崔岩 |
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| 作者单位： | 1. 大连理工大学,电子与信息工程学院,辽宁,大连,116023
2. 辽宁省微纳米技术及系统重点实验室,辽宁,大连,116023 |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 为了对原子力显微镜(AFM)中压电陶瓷管扫描位移进行非线性校正,提出了一种微位移测量与校正的简易方法.采用涡流位移传感器测量微位移,将其放大100倍以提高检测灵敏度;得到了压电陶瓷管的位移-电压曲线,其最高位移分辨率计算值为0.4 nm.根据AFM中压电陶瓷管的工作特点,确定扫描范围下测量得到的位移-电压关系,通过对等间隔像素点施加对应的非等间隔控制电压序列的方法进行非线性校正,依据像素点精度要求通过插值算法获得控制电压序列.系统采用LabVIEW虚拟仪器技术,校正后压电陶瓷管最大位移滞回偏差从10.1%降为0.4%.实验表明:扫描频率和扫描像素分辨率调节方便,同时校正算法复杂度也有所降低.
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| 关 键 词： | 压电陶瓷管 涡流位移传感器 位移测量 非线性校正 虚拟仪器 |
Measurement and nonlinear correction for micro-displacement of piezoceramic tube |
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| DONG Wei-jie,SONG Zhi-yang,CUI Yan.Measurement and nonlinear correction for micro-displacement of piezoceramic tube[J].Optics and Precision Engineering,2009,17(9). |
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| Authors: | DONG Wei-jie SONG Zhi-yang CUI Yan |
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| Affiliation: | DONG Wei-jie1,SONG Zhi-yang1,CUI Yan2(1.School of Electronic and Information Engineering,Dalian University of Technology,Dalian 116023,China,2.Key Laboratory for Micro/ Nano Technology and System of Liaoning Province,China) |
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| Abstract: | A simple way to measure and correct the micro-displacement of a piezoceramic tube used in an Atom Force Microscope(AFM) is proposed.The X/Y micro-displacement is detected by an eddy current meter and it is amplified by 100 times to improve the detection sensitivity.The relationships between the displacements of piezocaramic tube and the control voltages are obtained,and the highest resolution of displacement is calculated to be 0.4 nm.According to the working feature of the tube,the nonlinear correction is ... |
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| Keywords: | piezoceramic tube eddy current meter displacement measurement nonlinear correction virtual instrument |
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