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快速大面积测量用原子力显微镜扫描速度对测量结果的影响
引用本文:崔玉国,何高法,荒井羲和,高伟.快速大面积测量用原子力显微镜扫描速度对测量结果的影响[J].光学精密工程,2011,19(11):2636-2643.
作者姓名:崔玉国  何高法  荒井羲和  高伟
作者单位:1. 宁波大学机械工程与力学学院,浙江宁波,315211
2. 重庆科技学院机械与动力工程学院,重庆,401331
3. 东北大学工学院,日本宫城仙台980-8579
基金项目:日本学术振兴基金资助项目(No.18206016)
摘    要:构建了一种可快速大面积测量光栅表面微结构的原子力显微镜(AFM)系统,研究了不同扫描模式下扫描速度对测量结果的影响。分别测量了微悬臂探针在恒高模式与恒力模式下的频谱,获得了这两种模式下微悬臂探针的有效带宽。基于恒高模式与恒力模式,在不同扫描速度下分别测量了光栅微结构表面上的一条直线与一个圆周,进而分析了扫描速度对测量结果的影响。基于该AFM系统,采用恒高模式下不失真扫描速度对光栅微结构表面进行了快速、大面积三维形貌测量实验。实验结果表明:测量光栅微结构表面上直径为4.0mm的圆形区域所用时间仅为40s。当扫描速度不超过微悬臂探针有效带宽所对应的速度时,所构建的AFM系统可无失真地实现微结构表面的快速、大面积测量。

关 键 词:原子力显微镜(AFM)  快速测量  大面积测量  恒高模式  恒力模式  扫描速度

Effects of scanning speed on measurement results for high-speed and large-area measurement AFM
CUI Yu-guo,HE Gao-fa,ARAI Yoshikazu,GAO Wei.Effects of scanning speed on measurement results for high-speed and large-area measurement AFM[J].Optics and Precision Engineering,2011,19(11):2636-2643.
Authors:CUI Yu-guo  HE Gao-fa  ARAI Yoshikazu  GAO Wei
Institution:CUI Yu-guo1,HE Gao-fa2,ARAI Yoshikazu3,GAO Wei3(1.Faculty of Mechanical Engineering and Mechanics,Ningbo University,Ningbo 315211,China,2.College of Mechanical and Dynamic Engineering,Chongqing University of Science & Technology,Chongqing 401331,3.School of Engineering,Tohoku University,Sendai 980-8579,Japan)
Abstract:An Atomic Force Microscope(AFM) system with high-speed and large-area was constructed to measure the micro-structure surface of an optical grating.The effects of scanning speed on measuring results under different scanning modes were researched.First,the spectra of the micro-probe under constant-height and constant-force modes were measured,respectively,and the effective bandwidths of the probe were obtained under the two modes.Then,based on the constant-height and constant-force modes,the effects of scanni...
Keywords:Atomic Force Microscope(AFM)  high-speed measurement  large-area measurement  constant-height mode  constant-force mode  scanning speed  
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