超精密非球面镜面模具直轴磨削的研究

研究了非球面镜面模具直轴超精密磨削技术,给出了非球面镜面模具超精密加工机理、算法原理、软硬件结构、系统实现、工艺分析及实例应用,开发了小型超精密非球面镜面加工系统SGTCAM1.0.研究结果表明,系统原理正确,加工出的非球面光学零部件形状误差在100 nm以下,表面粗糙度在5 nm以下,达到纳米级加工精度.开发的系统使用方便,成本低.

Study of ultra-precision vertical grinding for aspheric lens mould

The mechanism of ultra-precision machining,the algorithm of principle,the structures of hardware and software,the realization of Computer Aided Manufacture(CAM) system and the analysis of processing were studied and presented to deal with vertical grinding and Single Point Diamond Turning(SPDT).The CAM system of small size ultra-precision aspheric lens for vertical grinding(SGTCAM 1.0) was developed.The principle is proved to be correct and the results are up to the nano manufacturing precision with the form error under 100 nm and the surface smoothness under 5 nm.The conflicts between huge market requirements of optical products and the high price of conditional ultra-precision numerical machine tools will be resolved by the low developing costs of the system.