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基于相位相关技术的MEMS旋转角度的高分辨力测量方法
引用本文:陈治,朱洪程,胡晓东,胡小唐.基于相位相关技术的MEMS旋转角度的高分辨力测量方法[J].光学精密工程,2009,17(8):1884-1889.
作者姓名:陈治  朱洪程  胡晓东  胡小唐
作者单位:天津大学,精密测试技术及仪器国家重点实验室,天津,300072
基金项目:国家863高技术研究发展计划资助项目,国家自然科学基金资助项目,新世纪优秀人才支持计划资助项目 
摘    要:实现MEMS微结构周期运动过程中各个时刻的旋转角度及其动态特性参数的高分辨力测量, 为提高MEMS器件的性能和可靠性分析提供重要参考。针对频闪成像技术获得的微结构运动图像序列,提出了一种基于相位相关技术与Radon变换技术相结合的旋转角度测量方法。该方法通过Radon变换将图像的空间坐标转换为极坐标的参数空间,使得空间坐标的旋转投影为参数坐标得平移运动,再通过相位相关技术的亚像素运动估计算法,可得到物体旋转角度的高分辨力测量结果。实验结果表明,该方法旋转角度测分辨力优于0.01°。该方法可以有效的减少由于旋转产生形变对测量结果的影响,提高测量结果的稳定性和减少测量误差。

关 键 词:MEMS谐振器  旋转角度  Radon  变换  相位相关
收稿时间:2008-10-06
修稿时间:2008-10-29

High resolution measurement of MEMS rotation angle by phase correlation method
CHEN Zhi,ZHU Hong-cheng,HU Xiao-dong,HU Xiao-tang.High resolution measurement of MEMS rotation angle by phase correlation method[J].Optics and Precision Engineering,2009,17(8):1884-1889.
Authors:CHEN Zhi  ZHU Hong-cheng  HU Xiao-dong  HU Xiao-tang
Affiliation:CHEN Zhi,ZHU Hong-cheng,HU Xiao-dong,HU Xiao-tang(State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China)
Abstract:High resolution measurement of rotation Motion was achieved to get characteristic and dynamic parameters of MEMS resonator in every moment. The results of measurement gave important reference to improve MEMS performance and reliability. In this paper, for the motion image sequence of microstructures collected by stroboscopic imaging technology, a method based on combination of Radon transform and phase correlation was designed. The motion in Descartes coordinates can be transform to parameters of polar coordinates so that rotation motion is projected to displacement of parameters. The displacement can be measured by phase correlation method to realize subpixel motion measurement. Experimental results achieved that the power of resolution of rotation angle is superior to 0.01°. MEMS motion process is analyzed using the method. The offered solution indicate that the influence of distortion caused by rotation are deceased, and repetition of measurement is increased by always employing the method.
Keywords:MEMS resonator  Rotaion angle  Radon transform  Phase correlation
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