压电陶瓷管微位移测量与非线性校正

介绍了一种用于原子力显微镜的压电陶瓷管X/Y方向微位移特性的测量与校正简易方法。采用涡流位移传感器测量微位移，通过100倍放大提高检测灵敏度；产生X/Y方向控制电压的D/A和采集微位移信号的A/D均为16位，最高位移分辨率计算值为0.4nm。根据原子力显微镜中压电陶瓷管的工作特点，利用测量得到的确定扫描范围下的位移-电压关系，通过对等间隔像素点施加所对应的非等间隔控制电压序列的方法进行非线性校正，控制电压序列可依据像素点精度要求通过插值算法获得。系统采用LabVIEW虚拟仪器技术，扫描频率和扫描像素分辨率调节方便，校正前后的压电陶瓷管最大位移滞回偏差分别为10.1％和0.4％。

Measurement and Correction for Micro-displacement of Piezoceramic Tube

This paper introduces a simple way to measure and correct micro-displacement of piezoramic tube with intended use in atom force microscope. The X/Y micro-displacement is detected by an eddy current meter and then 100 times amplified. D/A for producing the control voltage and A/D for acquiring micro-displacement are both16 bits. The highest resolution of displacement is calculated to be 0.4nm. According to the working feature of the tube, nonlinear correction is realized by applying non-equidistant control voltage series while scanning to equidistant pixel. The non-equidistant control voltage series in the demand of different pixel resolution is obtained through interpolation based on the measured displacement-voltage relationship. By adopting the labVIEW technology the proposed system can easily adjust the scan frequency and pixel resolution for the tube. The maximum hysteresis error before and after correction are 10.1% and 0.4% respectively.