| 一种新型光纤传感器在精密产品加工中的应用研究 |
| |
| 引用本文： | 曾毅,侯国章.一种新型光纤传感器在精密产品加工中的应用研究[J].光学精密工程,2001,9(2):139-140. |
| |
| 作者姓名： | 曾毅 侯国章 |
| |
| 作者单位： | 哈尔滨工业大学机电工程学院, |
| |
| 摘 要： | 利用所研制的新型反射式光纤传感器对精密产品加工中的小台阶、沟槽等进行了测试研究。测试系统充分发挥了激光光纤传感测量方法的突出优点,实现对精密产品的非接触、快速地检测。传感器的高度分辨力可达0.4μm,定位精度可达±2μm。
|
| 关 键 词： | 光纤传感器 精密加工 激光 非接触检测 |
| 文章编号： | 1004-924X(2001)02-0139-03 |
| 收稿时间： | 2000-12-04 |
| 修稿时间： | 2000年12月4日 |
Applications of novel optical fiber sensors in manufacturing precision products |
| |
| ZENG Yi,HOU Guo-zhang.Applications of novel optical fiber sensors in manufacturing precision products[J].Optics and Precision Engineering,2001,9(2):139-140. |
| |
| Authors: | ZENG Yi HOU Guo-zhang |
| |
| Affiliation: | Harbin Institute of Technology, School of Electromechanical Engineering, Harbin, 150001, China |
| |
| Abstract: | Based on the newly developed laser optical fiber sensor, the small step products and grooves machined by precision processing were experimentally measured according to the laser reflex principle. By making full use of the outstanding merits of the laser optical fiber sensing technology, a non-contact, high-speed inspection for the precision products is realized. The longitudinal resolution of the sensor can reach 0.4μm, and the positioning accuracy is better than ±2μm. |
| |
| Keywords: | optical fiber sensors precison finishing laser non contact inspection |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
| 点击此处可从《光学精密工程》浏览原始摘要信息 |
|
点击此处可从《光学精密工程》下载全文 |
|
