二自由度微定位平台的研制

研制了一台压电陶瓷驱动和弹性铰链导向的一体化微定位平台,该微定位平台具有高刚度、高响应速度和高分辨率等优点。为了克服压电陶瓷驱动器伸长量较小的不足,采用杠杆放大机构增加微定位平台的位移输出。考虑驱动电路的影响,建立了微定位平台的机电耦合模型。通过试验研究了微定位平台的静动态特性,试验结果表明微定位平台的分辨率为5 nm,固有频率分别为143 Hz和180 Hz。该微定位平台可应用于纳米级的微定位。

Development of a 2-DOF micropositioning table

A piezoelectrically driven micropositioning table with high stiffness and resolution was presented. A flexure hinge mechanism was utilized to guide the moving part and to provide preload for the piezoelectric actuators. The lever amplifiers were used to enlarge the working range of the moving platform. The static and dynamic characteristics of the micropositioning table was investigated and its dynamic model was established for consideration of the driving circuit. From the experimental data, it is shows that the piezoelectrically driven micro-positioning table has a resolution of 5 nm and natural frequencies up to 143 Hz and 180 Hz, respectively, which indicates that the table is useful for nanometer level positioning applications.