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压电陶瓷微位移器件控制模型的研究
引用本文:曲东升,荣伟彬,孙立宁,徐晶,蔡鹤皋.压电陶瓷微位移器件控制模型的研究[J].光学精密工程,2002,10(6):602-607.
作者姓名:曲东升  荣伟彬  孙立宁  徐晶  蔡鹤皋
作者单位:哈尔滨工业大学,机器人研究所,黑龙江,哈尔滨,150001
基金项目:哈尔滨工业大学跨学科交叉性研究基金资助项目(HIT.MD.2001.07)
摘    要:从不同角度介绍了压电陶瓷微位移器件的两种控制模型.首先,借助于统计物理学分析,结合数学建模方法,建立了一个简单实用的压电陶瓷的迟滞数学模型.其次,借助于弹性体变形理论,介绍了压电/电致伸缩陶瓷的归一化控制模型,从理论上说明了采用电极化强度的方法可以有效减小迟滞的观点.并设计了两种实验系统,对两种控制模型进行了实验验证,实验结果表明,所建立的两种模型可有效减小压电陶瓷的迟滞非线性误差,提高压电陶瓷微位移的控制精度,有助于实现压电陶瓷驱动器的高精度开环微位移控制.

关 键 词:压电陶瓷  控制模型  迟滞  极化强度
文章编号:1004-924X(2002)06-0602-06
收稿时间:2002/4/17
修稿时间:2002年4月17日

Research on the control model of piezoelectric micropositioning actuator
QU Dong-sheng,RONG Wei-bin,SUN Li-ning,XU Jing,CAI He-gao.Research on the control model of piezoelectric micropositioning actuator[J].Optics and Precision Engineering,2002,10(6):602-607.
Authors:QU Dong-sheng  RONG Wei-bin  SUN Li-ning  XU Jing  CAI He-gao
Affiliation:Robot Research Institute, Harbin University of Technology, Harbin, 150001, China
Abstract:Two control models for piezoelectric actuators are introduced from different angles. Firstly, by means of statistic physical analysis, a simple and practical mathematic formula describing the hysteresis of a piezoelectric actuator built by a mathematic modeling method. Then, based on elastic deformation theory, a normalization model of piezoelectric/electrostrictive effect is introduced. Accordingly, the viewpoint that hysteresis can be greatly reduced by polarization control method was proved theoretically. Two experimental systems were designed and two control models tested, respectively. Some experimental results show that the models are effective in decreasing the error arising from nonlinear hysteresis. In this way the micropositioning control accuracy of piezoelectric actuators can be improved. As a result, the research is helpful to realize high precision open loop micropositioning controls based on piezoelectric actuators.
Keywords:piezoelectric actuator  control model  hysteresis  polarization intensity
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