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真空紫外电离室的研究
引用本文:钱莉民,金蕾,李福田,陈星旦.真空紫外电离室的研究[J].光学精密工程,1991,0(3):6-11.
作者姓名:钱莉民  金蕾  李福田  陈星旦
摘    要:软X线-真空紫外辐射计量测试工作发展十分迅速。描述我们研制成功的真空紫外稀有气体电离室绝对型探测器的工作原理、结构和性能。讨论基于McPherson 247掠入射真空紫外单色仪的探测器性能测试装置及性能评价结果。


A Study for VUV Ionization Chamber
Qian Limin,Jin Lei,Li Futian,Chen Xingdan.A Study for VUV Ionization Chamber[J].Optics and Precision Engineering,1991,0(3):6-11.
Authors:Qian Limin  Jin Lei  Li Futian  Chen Xingdan
Abstract:With the development of space science, plasma physics and short wavelength laser study in recent years, there is a great progress on soft X-ray and Vacuum Ultraviolet spectral radiation metrology. This paper discusses the operating principle, the structure and the performance of VUV rare gas ionization chamber standard detector developed in this Lab, describes the evaluating equipment of the detector performance which is based on McPherson 247 grazing incidence VUV monochromator, and finally presents the measurement results.
Keywords:
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