| 基于小波能量熵与二维Zernike矩的IC芯片表面微观不平度图像检测技术研究 |
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| 引用本文： | 梁忠伟,张春良,叶邦彦,江帆,胡晓.基于小波能量熵与二维Zernike矩的IC芯片表面微观不平度图像检测技术研究[J].机械设计与制造,2010(1). |
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| 作者姓名： | 梁忠伟 张春良 叶邦彦 江帆 胡晓 |
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| 作者单位： | 1. 广州大学,机械与电气工程学院,广州,510006
2. 华南理工大学,机械与汽车工程学院,广州,510640 |
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| 基金项目： | 国家“863”计划项目(2008AA04Z40) |
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| 摘 要： | 在IC芯片制造检测过程中,需要完整而准确地对芯片表面形貌进行检测。针对IC芯片表面形貌检测的要求,提出了基于小波能量熵与二维Zernike矩的芯片表面微观不平度图像检测技术,并运用于高精度要求的计算机芯片图像处理工作中。通过对获得的芯片显微图像进行小波变换并求取信息熵图像的基础上,建立二维Zernike矩与采用BP神经网络进行芯片表面不平度的识别与评定。编程实验证明,采用本方法可准确对IC芯片表面微观不平度进行等级评定。
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| 关 键 词： | 芯片检测 小波分析 能量熵 二维Zernike矩 |
Study of micro-plainness detecting technology based on IC chip surface wavelet energy entropy and two-scale zernike moment |
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| LIANG Zhong-wei,ZHANG Chun-liang,YE Bang-yan,JIANG Fan,HU Xiao.Study of micro-plainness detecting technology based on IC chip surface wavelet energy entropy and two-scale zernike moment[J].Machinery Design & Manufacture,2010(1). |
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| Authors: | LIANG Zhong-wei ZHANG Chun-liang YE Bang-yan JIANG Fan HU Xiao |
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| Affiliation: | 1 School of Mechanical and Electrical Engineering/a>;Guangzhou University/a>;Guangzhou 510006/a>;China;2 School of Mechanical and Automobile Engineering/a>;South China University of Technology/a>;Guangzhou 510640/a>;China |
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| Abstract: | In IC chip accurate optical inspecting,it is necessary to gain detect chip's micro-surface feature completely and accurately.For this purpose,a new micro-plainness detecting technology based on IC chip surface wavelet energy entropy and two-scale Zernike moment is investigated to detect IC surface' s plainness.By wavelet transformation and energy entropy of image topography image,two-scale Zernike moment is built up and BP neural network is used to calibrate surface s micro-plainness.Experimental result ind... |
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| Keywords: | IC detecting Wavelet analyze Energy entropy Two-scale zernike moment |
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