导光板模具微冲孔机床在位测量系统的设计与研究

针对导光板模具微结构加工过程中微孔尺寸定时在位测量的要求,基于视觉测量技术提出了在微冲孔机床上集成导光板模具微孔点阵在位测量系统的解决方案.它通过相机获取微结构的加工图像,运用一系列图像处理算法提取测量目标的亚像素边缘并进行拟合.提出两步标定技术求取亚毫米视野镜头畸变映射及像素当量.通过将视觉测量结果与白光干涉仪的测量...

Design and Research of in Situ Measuring System for Light Piercing Die Micro Punching Machine

In view of the requirement of measuring the size of the micropore in the machining process of the light guide plate microstructure,a solution for the in-situ measuring system of micro hole array integrated with light guide plate on micro punching machine is put forward based on the vision measurement technology.It acquires the image of the micro structure through the camera,and uses a series of image processing algorithms to extract the sub pixel edges of the measured targets and to fit them.A two step calibration technique is proposed to calculate the lens distortion mapping and pixel equivalent in sub millimeter field.By comparing the results of visual measurement with those of white light interferometer,it is proved that the accuracy of the measurement system can reach within(+1 Micron),and it has the characteristics of real-time,fast,high precision and good repeatability.