基体负偏压对CrAlN涂层组织和性能的影响

采用真空多弧离子镀技术,使用Cr30Al70(原子分数)复合靶,在不同的基体负偏压下,在不锈钢基体上制备了一系列CrAlN涂层;采用能谱仪、X射线衍射仪、扫描电子显微镜、粗糙度仪、显微硬度仪、摩擦磨损试验机和划痕仪等系统分析了涂层的成分、表面形貌、相结构、粗糙度、显微硬度、摩擦磨损性能和界面结合性能。结果表明:随着负偏压的增大,涂层中x(Cr)/x(Cr+Al)的比值先增大后减小,当负偏压为150V时,该值达到最大,并与靶材成分接近;基体负偏压为200V时,涂层的表面粗糙度最大,涂层结晶度、硬度最佳,晶体相为固溶铬的面心立方AlN;涂层的摩擦磨损性能不仅与涂层的表面粗糙度相关,还与涂层非晶相中铝元素的含量以及涂层的内应力大小密切相关;界面过渡层制备工艺相同时,基体偏压对涂层和基体之间的界面结合性能影响较小。

Effects of Substrate Negative Bias Voltage on Microstructure and Properties of CrAlN Coatings

Taking Cr30Al70(atomic percent) as composite target,vacuum arc ion plating technology was used to prepare a series of CrAlN coatings on stainless steel substrates at different substrate negative bias voltages.The composition,surface morphology,phase structure,roughness,micro-hardness,friction and wear properties and interfacial adhesion property were analyzed systematically by energy dispersive spectroscopy,X-ray diffraction,scanning electron microscopy,roughness testing,micro-hardness testing,scratch testing,friction and wear testing,etc.The results show that the value of x(Cr)/x(Cr+Al) increased first and then decreased with the increase of the bias voltage,the value reached maximum when the negative bias voltage was 150 V,and its composition was near to that of the target.When the negative bias voltage was 200 V,the coatings had maximal surface roughness,the coating′s crystallinity and the hardness were fair high,and the crystalline phase was face centered cubic AlN with Cr solid solution.Not only was the roughness of the coating,but also the content of Al in amorphous phase and innerstress of the coatings closely related to the friction and wear properties of the coating.The substrate bias voltage had fair little effect on the interfacial adhesion property when the preparing progress for interface transition layer was same.