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降低电感接触式测量仪系统误差的方法研究
引用本文:孙艳玲.降低电感接触式测量仪系统误差的方法研究[J].中国仪器仪表,2006(9):48-51.
作者姓名:孙艳玲
作者单位:湖北襄樊学院,湖北,襄樊,441053
摘    要:本文分析了传统电感接触式测量仪的系统误差,提出了一种基于垂直位移扫描工作的表面轮廓综合测量仪的整体设计方案,克服了接触式测量仪的大量程和高精度之间的矛盾,给出了实际测量结果。

关 键 词:电感接触式测量仪  非线性  杠杆  测量力

Research on the Means for Reducing the System Error of Contact-inductance Profilometer
Abstract:Bring forward a whole frame project of profilometer based on the vertical scanning of displacement after analyzing the system error of tradition inductance contacting profilometer in this paper. This kind of profilometer can overcome the conflict between the large-range and the high-precision of measuring which exists in the contacting profilometer. The experimental results of surface profile are also presented.
Keywords:Inductance contacting profilometer Non-linearity Lever Measure-force
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