音圈电动机驱动的快速精密定位系统设计与控制方法研究

针对传统驱动方式在快速定位方面的不足,研制一种基于音圈电动机驱动的快速精密定位系统,分析定位系统的关键部件--气浮滑块的承载力和刚度,设计能够满足音圈电动机和气浮滑块的、高精度联接要求的仿球形联轴器.研究快速定位系统的控制方法,通过比例积分微分(PID)预测补偿、模糊预测补偿来修正定位误差.在此基础上,测试快速精密定位系统的综合性能,实验结果表明,所设计的定位系统能够满足高精度和高频响的运动要求.

Study on design and control method of rapid precision locating system driven by voice coil motor

With a view to some disadvantages of traditional driving way in rapid locating field,a rapid precision locating system is developed which is driven by Voice Coil Motor(VCM).The load and stiffness of aerostatic slide which is a key part in locating system are analyzed.In order to achieve stable connection with high precision between VCM and aerostatic slide,a kind of spherical shaft coupling is designed.The control method of rapid locating system is studied,and moving error is corrected by using PID predictive compensation and fuzzy predictive compensation.Moreover,the general performances of rapid locating system are measured,and the experimental results show that this locating system can satisfy the requirements of high precision and high response.