| 变截面微管道的制作与气体流动特性分析 |
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| 引用本文： | 丁英涛,姚朝晖,郝鹏飞. 变截面微管道的制作与气体流动特性分析[J]. 机械强度, 2003, 25(2): 144-147 |
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| 作者姓名： | 丁英涛 姚朝晖 郝鹏飞 |
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| 作者单位： | 清华大学,工程力学系,北京,100084 |
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| 基金项目： | 国家自然科学基金资助项目 (1 0 2 72 0 66)，教育部留学回国人员基金，清华大学校基础基金资助项目~~ |
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| 摘 要： | 为提高硅微无阀泵和空间微推进器的性能，采用微电子机械工艺在硅片上加工出不同长度，不同喉部宽度、断面形状为矩形的变截面微管道，实验测量微管道内氮气的流量特性，分析不同因素对流动特性的影响，研究发现，相同变截面微管道，扩张方向的性能好于收缩方向，不同变截面微管道，随着扩张角，等直段长度，宽度的不断增加，流动性能逐渐提高。
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| 关 键 词： | 变载面微管道 扩张角 微电子机械系统 体积流量 Knudsen数 微泵 |
| 修稿时间： | 2002-09-02 |
FABRICATION AND GAS FLOW CHARACTERISTICS ANALYSIS OF MICRO DIFFUSER/NOZZLES |
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| DING Yingtao YAO Zhaohui HAO Pengfei. FABRICATION AND GAS FLOW CHARACTERISTICS ANALYSIS OF MICRO DIFFUSER/NOZZLES[J]. Journal of Mechanical Strength, 2003, 25(2): 144-147 |
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| Authors: | DING Yingtao YAO Zhaohui HAO Pengfei |
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| Abstract: | Investigating the behavior of micro diffusers/nozzles was valuable for improving the performance of micro-valveless pumps and micro thrusters. Micro diffusers/nozzles were fabricated in silicon based on MEMS (micro-electro-mechanical systems) technology. The relationship between volume flow rate and inlet/outlet pressure difference of nitrogen were measured in the experiment. Several factors influencing on the flow characteristics were analyzed. It is found that the experimental values for diffuser flow are slightly higher than those for nozzle flow. With the increase of taper angle, the length and the width of straight microchannel, the flow performance is improved. |
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| Keywords: | Micro diffusers/nozzles Taper angle Micro-electro-mechanical system Volume flow rate Knudsen number |
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