压电驱动柔性铰链机构传动实现超精密定位

简单介绍压电元件和柔性铰链的概念与特点。列举压电元件与柔性铰链机构结构实现超精密定位的典型例子，包括超精密测量、超精密加工、光学自动聚焦和大行程超精密定位。为使超精密定位工作台的结构紧凑，提出单驱动多自由度运动机构。应用蠕动式的运动原理可合成机构上的多自由度运动，并实现大行程运动。设计了对称结构的柔性铰链机构实现导向功能。制造和装配了微小型平面工作台。

USING PIEZOACTUATOR AND FLEXURE HINGE MECHANISM TO ACHIEVE ULTRA PRECISION POSITIONING

The concepts and characteristics of piezoactuator and flexure hinge are described. The examples of using piezoactuator and flexure hinge mechanism to achieve ultra precision positioning are introduced, which include ultra precision measurement, ultra precision machining, autofocusing system of optical microscope and large movement rang ultra precision stage. To compact the structure of ultra precision stage, a novel mechanism driven by one actuator to obtain 3DOF motion is presented. The movement principle of inchworm is applied to couple the motions of the mechanism, and large movement range is also achieved. Flexure hinge mechanism based on the novel mechanism is designed symmetrically to guide directions of motions. The manufacture and assembling of micro planar stage are described.