| 利用波形比较法进行高量程加速度传感器横向响应的测试研究 |
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| 引用本文： | 鲍海飞,宋朝辉,李昕欣,刘民,张鲲,陆德仁.利用波形比较法进行高量程加速度传感器横向响应的测试研究[J].机械强度,2009,31(6). |
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| 作者姓名： | 鲍海飞 宋朝辉 李昕欣 刘民 张鲲 陆德仁 |
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| 作者单位： | 中国科学院,上海微系统与信息技术研究所,传感技术国家重点实验室,上海200050 |
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| 基金项目： | 国家973计划，国家863计划 |
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| 摘 要： | 提出一种高量程加速度传感器横向响应的测试方法--波形可识别的比较法,对高量程加速度传感器非敏感方向(横向)的输出特性进行测试研究.实验中采用自由落杆的方法,将已经标定过的传感器和带测试的传感器以背对背的方式进行安装,通过同时比较监控两通道的输出波形,可以确定器件的横向灵敏度.此方法简单可靠,并容易实施,对测试中产生的误差进行分析.
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| 关 键 词： | 高量程微加速度传感器 横向响应 波形比较法 自由落杆 微机电系统 |
STUDY ON THE TRANSVERSE RESPONSE OF HIGH-g ACCELEROMETER BY A COMPARISON METHOD OF WAVEFORM |
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| BAO HaiFei,SONG ZhaoHui,LI XinXin,LIU Min,ZHANG Kun,LU DeRen.STUDY ON THE TRANSVERSE RESPONSE OF HIGH-g ACCELEROMETER BY A COMPARISON METHOD OF WAVEFORM[J].Journal of Mechanical Strength,2009,31(6). |
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| Authors: | BAO HaiFei SONG ZhaoHui LI XinXin LIU Min ZHANG Kun LU DeRen |
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| Abstract: | A method was proposed for measuring the transverse response of high-g accelerometer, in which, a comparison method of waveform with recognizable features was used to investigate the output properties in its non-sensitive direction. The standard accelerometer and the accelerometer to be measured were mounted in a back-to-back style onto the end of free-drop metal bar in the experiment. By simultaneously monitoring the outputs of the dual-channels, the transverse sensitivity of the device can be determined. The measurement result was verified and its error was analyzed, it shows this method is reliable and easily to be implemented. |
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| Keywords: | High-g accelerometer Transverse response Comparison method of waveform Free-drop bar Micro-electro-mechanical system(MEMS) |
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