新型宽温区压力传感器技术

为研制新型耐高温和耐低温压力传感器,提出了一种基于SOS(蓝宝石上硅)技术制造的压力传感器.所述硅-蓝宝石压力传感器采用先封装再刻制应变电阻的新工艺,制成的应变电阻和补偿用热电阻精度高、质量好,且在整个工艺流程中不使用化学药品,对环境无污染.制成的硅-蓝宝石压力传感器,可以测量在-55～+400 ℃宽温区范围内的流体压力,并可以同时测量温度.给出了该传感器的试验数据,得到了比较满意的结果.

Technology of New Wide-Temperature-Range Pressure Sensor

For the development of a new high and low temperature pressure sensor, a pressure sensor based on the technology of Silicon on Sapphire (SOS) was designed.The sensor makes use of the advanced technology which has the sensory unit packaged before strain resistance lithography.This method makes high precision and good quality of the strain resistance and thermal resistance.What is more, no chemical is used during the process.As a result, there will be no environment pollution.It can measure a fluid pressure at -55 ℃ to +400 ℃ by using the sensor, and it can measure the temperature at the same time.The testing data of the sensor is supplied, and the result is satisfactory.