具有高灵敏度声表面波应变传感器的仿真与设计

针对高温高旋环境下部件健康监测的需求,设计了一种背部带有凹槽的基于硅酸镓镧(LGS)的声表面波应变传感器.通过COMSOL软件建立应变传感器模型,对应变传感器表面应变分布情况及传感器灵敏度进行仿真,确定了制备传感器的最佳模型参数,同时通过对传感器施加不同的温度场,得到了传感器的应变灵敏度随温度的变化规律.仿真结果表明,...

Simulation and Design of Acoustic Surface Wave Strain Sensor with High Sensitivity

An acoustic surface wave strain sensor with groove-based lanthanum gallium silicate(LGS)was designed for component health monitoring in high-temperature high-spin environments.The strain sensor model was established by COMSOL software,simulating the surface strain distribution and sensor sensitivity of the strain sensor,determined the best model parameters of the designed sensor.Meanwhile,by applying different temperature fields to the sensor,the variation of strain sensitivity with temperature was obtained.Simulation results show that the strain sensitivity of the sensor decreases nonlinear with the temperature increases,and the temperature effect on the strain sensitivity increases from 0.0028 Hz/(ppm·℃)to 0.0203 Hz/(ppm·℃).The above results provide reference for the preparation and testing of the acoustic surface wave strain sensor.