压力传感器厚膜温度补偿技术研究

采用厚膜电路制造技术实现硅基压力传感器的温度补偿,不仅可以使传感器的补偿精度高、补偿温区宽,而且可以使传感器的可靠性、抗震动性、耐高低温冲击性以及传感器的外观品质得以全面提升。文中介绍了压力传感器温度补偿电阻网络的原理、厚膜电路的设计和制造技术、网络阻值调整等方面的研究,通过合理的版图、结构和工艺设计,实现了OEM压力传感器的温度补偿,已在压力传感器产品的生产中得到成功应用。

Thick Film Temperature Compensation Technology of Pressure Sensor

Temperature compensation of silicon base pressure sensor were realized by the thick film circuit manufacturing technology, it extended the compensation temperature range and improved the temperature compensation precision. The other performance, such as the reliability, aseismatic capacity, high or low temperature shocking resistance, was also improved. The resistor network principle in the thick film temperature compensation circuit, the thick film circuit design and manufacturing technology and the resistance adjusting method were introduced. According to reasonable circuit, structure and technique design of the thick film circuit, the temperature compensation of the OEM pressure sensor was realized. The thick film temperature compensation technology of pressure sensor was successfully used in the production process.