| MEMS技术的智能化硅压阻汽车压力传感器 |
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| 引用本文： | 毛超民,王政平,王冰,任峰.MEMS技术的智能化硅压阻汽车压力传感器[J].仪表技术与传感器,2009(Z1). |
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| 作者姓名： | 毛超民 王政平 王冰 任峰 |
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| 作者单位： | 昆山双桥传感器测控技术有限公司,江苏昆山,215325 |
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| 摘 要： | 文中介绍通过采用MEMS(micro electro mechanical systems)技术制造的硅压阻力敏元件结合智能集成化信号调理技术设计了适合批量制造的小型化坚固封装的通用汽车压力传感器.通过智能调理技术将传感器的零位和满度进行温度校准实现了宽温度工作范围内的高精度测量,并且适合于批量制造.
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| 关 键 词： | 微机械加工技术 硅压阻 智能校准补偿技术 汽车压力传感器 |
MEMS Technology of Intelligent Silicon Automotive Pressure Transducer |
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| MAO Chao-min,WANG Zheng-ping,WANG Bing,REN Feng.MEMS Technology of Intelligent Silicon Automotive Pressure Transducer[J].Instrument Technique and Sensor,2009(Z1). |
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| Authors: | MAO Chao-min WANG Zheng-ping WANG Bing REN Feng |
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| Abstract: | This paper presented the miniaturization general automotive pressure transducer which designed by combination of MEMS silicon piezoresistive pressure sensors and intelligent signal calibration technology, that's suitable for mass production. It realizes precise measurement while sensors working over all temperature by using intelligent signal calibration technology to calibrate temperature-coefficients of zero and span tolerance. |
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| Keywords: | MEMS silicon piezoresistive intelligent calibration technology automotive pressure sensor |
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