基于加速应力法的压力传感器泄漏检测

通过加速泄漏试验,对使用条件下压力传感器基准腔O型密封圈的气密性能进行检验,识别出密封结构存在潜在泄漏故障的产品。通过稳定产品温度、固定观测姿态、控制检测时间等方法改进了测量系统,以精确地检测泄漏结果。在既保证加速效果,又不造成产品损伤的前提下,对压力传感器施加温度、压力激发应力,经过多组温度和压力参数组合的加速泄漏试验,将试验后压力传感器的泄漏量与实际工作中的泄漏量相比较,计算得到加速泄漏试验的加速倍率,确定了压力传感器加速泄漏试验合格判据。通过试验比较,最终选定高温70℃、加压0.3 MPa、保持48 h的试验方案。加速泄漏试验方法可作为压力传感器的寿命试验方法,验证产品的使用期限。

Accelerated Stress Method Based Pressure Signal Sensor Leak Detection

By checking the air tightness performance of O-ring on the reference cavity of pressure sensor with leak expediting test,the pressure sensors with potential leak fault could be picked out.The measurement system is improved by stabilizing the product temperature,fixing the observation attitude and controlling the detection time to detect the leakage result accurately.On the premise of not only ensuring the acceleration effect,but also not causing product damage,the pressure sensor is applied with temperature and pressure-induced stress,and the accelerated leakage test is conducted through a combination of multiple temperature and pressure parameters.By comparing the leakage rate of the post-test pressure sensor with that of the working pressure sensor,the acceleration ratio of the accelerated leakage test is calculated,and the qualified criterion of the accelerated leakage test of the pressure sensor is determined.With the comparison of test results,applying 0.3 MPa to the pressure sensors under heating temperature 70℃for 48 hours is selected as the final test scheme.Leak expediting test can be used as a life test method to verify service life of pressure sensors.