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基于PVDF传感器的高速圆度测量系统
引用本文:孔明,周洋,程琦,董盈钧.基于PVDF传感器的高速圆度测量系统[J].仪表技术与传感器,2011(5).
作者姓名:孔明  周洋  程琦  董盈钧
作者单位:中国计量学院计量测试工程学院,浙江杭州,310018
摘    要:针对机械加工行业圆度测量高速高效的要求,设计了一种基于聚偏氟乙烯(PVDF)压电薄膜的压电式位移传感器的高速圆度测量系统,利用此传感器高频响、高灵敏度、高信噪比的优势,通过与电荷放大器相结合,实现高速圆度测量.通过实验可知PVDF传感器测量频率响应在1200Hz以上,谐振峰频率在3000 Hz左右,解决了电感传感器在高速圆度测量中测量结果出现失真的问题.测量数据分析结果表明,此系统圆度测量误差可达到1 μm以内.多次测量证明,该系统测量结果重复性好、可信性高.

关 键 词:聚偏氟乙烯  圆度  测量仪  传感器

High-speed Roundness Measurement System Based on PVDF Film Transducer
KONG Ming,ZHOU Yang,CHENG Qi,DONG Ying-jun.High-speed Roundness Measurement System Based on PVDF Film Transducer[J].Instrument Technique and Sensor,2011(5).
Authors:KONG Ming  ZHOU Yang  CHENG Qi  DONG Ying-jun
Affiliation:KONG Ming,ZHOU Yang,CHENG Qi,DONG Ying-jun(College of Metrological Technology and Engineering,China Ji Liang University,Hangzhou 310018,China)
Abstract:For the demands of high speed and efficiency of on-line measurement of roundness in machining industry,a kind of high-speed roundness measurement system based on the piezoelectric displacement transducer that used the PVDF film was developed.It can achieve the goal of high-speed roundness measurement by combining with charge amplifier and taking advantages of transducer such as the high frequency,sensitivity and signalto-noise ratio.The experiment results indicated that the measuring frequency response of t...
Keywords:PVDF  roundness error  measuring instrument  transducer  
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