| Fe2O3—TiO2薄膜表面Au修饰对CO敏感特性的影响 |
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| 引用本文： | 管玉国,戴国瑞.Fe2O3—TiO2薄膜表面Au修饰对CO敏感特性的影响[J].仪表技术与传感器,1996(7):37-39. |
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| 作者姓名： | 管玉国 戴国瑞 |
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| 作者单位： | 吉林大学 长春市130023 |
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| 摘 要： | 以Fe(CO)_6和TiCl_4为原料,用PECVD技术制备了Fe_2O_3-TiO_2双层超微粒薄膜.对双层薄膜的组成和形貌进行了XRD及SEM分析.同时对双层薄膜以化学镀方式进行贵金属Au的表面修饰,并对薄膜样品进行气敏特性测试,发现对CO具有很高的灵敏度与选择性.
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| 关 键 词： | Fe_2O_3-TiO_2薄膜 表面修饰 一氧化碳 气敏特性 |
Effects of Fe_2O_3-TiO_2 Thin Films Modified by Au on Their CO Sensing Properties |
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| Guan Yuguo,Dai Guorui and Nan JinJilin University,Changchun ..Effects of Fe_2O_3-TiO_2 Thin Films Modified by Au on Their CO Sensing Properties[J].Instrument Technique and Sensor,1996(7):37-39. |
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| Authors: | Guan Yuguo Dai Guorui and Nan JinJilin University Changchun |
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| Affiliation: | Guan Yuguo,Dai Guorui and Nan JinJilin University,Changchun 130023. |
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| Abstract: | Fe2O3-TiO2 thin films are fabricated by means of PECVD process with Fe(CO)5 and TiCl4 as the precursors and the surfaces of the films are modified by Au chemical plating. The composition and surface morphology of the films are investigated with X-ray diffraction (XRD) and scanning electron microscope (SEM). The sensing properties of the thin films to CO gas are measured and it is shown that a high sensitivity and selectivity of the thin films are obtained herein. |
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| Keywords: | Fe2O3-TiO2 Thin Films Thin Films Modification CO Gas Sensing Property |
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