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紫外曝光机均匀照明系统的设计与研究
引用本文:刘鹏飞,杨波,陆侃.紫外曝光机均匀照明系统的设计与研究[J].光学仪器,2012,34(2):31-36.
作者姓名:刘鹏飞  杨波  陆侃
作者单位:上海理工大学光电信息与计算机工程学院,上海,200093
摘    要:紫外曝光机是印刷线路板(PCB)制作工艺中的重要设备,PCB高密度、微细化的发展趋势,对曝光机光照均匀性,平行性的要求越来越高。为了找出可以更好满足市场需求的曝光机光学系统,运用非成像光学方法,对两种不同光学结构曝光机的光斑均匀性进行了对比分析。通过实验可以看出,在通光孔径较大的光学系统中,复眼透镜阵列和方棒对改善系统光照均匀性以及能量利用率的作用,在实验基础上对如何选择光学系统的匀光器件做了对比性阐述。

关 键 词:印刷线路板(PCB)  紫外曝光机  复眼  方棒
收稿时间:2011/10/25

Design and research on the uniform illumination system of UV exposure machine
LIU Pengfei,YANG Bo and LU Kan.Design and research on the uniform illumination system of UV exposure machine[J].Optical Instruments,2012,34(2):31-36.
Authors:LIU Pengfei  YANG Bo and LU Kan
Affiliation:(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)
Abstract:Ultraviolet exposure machine is an important equipment in the printed circuit board(PCB) manufactruring process.The high density and miniature of PCB is demanding higher level of illumination uniformity and parallel degree.In order to find a better optical system to meet the requirement of exposure machine market,method of nonimaging optics is adopted here to make the comparision of exposure effects between two types of exposure machine with different structures.The conclusion from the simulation is that in the optical system with larger clear aperture,different effects are resulted in improving the illumination uniformity and energy density of the system by using fly eye lens or square rod.Comparision is made on how to choose the light-uniform component in optical system on the basis of simulation.
Keywords:printed circuit board(PCB)  UV exposure machine  fly eye lens  light pipe
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