| 凹面光栅分辨率的检测方法研究 |
| |
| 引用本文： | 苏仰庆,黄元申,杨海马.凹面光栅分辨率的检测方法研究[J].光学仪器,2015,37(6):498-503. |
| |
| 作者姓名： | 苏仰庆 黄元申 杨海马 |
| |
| 作者单位： | 上海理工大学光电信息与计算机工程学院, 上海 200093,上海理工大学光电信息与计算机工程学院, 上海 200093,上海理工大学光电信息与计算机工程学院, 上海 200093 |
| |
| 基金项目： | 国家自然科学基金(61378060,61205156);国家重大科学仪器设备开发专项(2012YQ170004);上海市教育委员会科研创新项目(14YZ095) |
| |
| 摘 要： | 构建满足凹面光栅使用条件的精确检测系统来检测凹面光栅的分辨率,根据系统的光源带宽、狭缝宽度和探测器像素尺寸的理论分析,结合凹面光栅的像差分析,给出一种凹面光栅分辨率检测系统的检测方法。系统按照JB/T 8239.2—95《衍射光栅技术条件》的标准方法,定量分析出上述三个因素的影响量,并提出了合理的计算方法,从而在检测系统的测量值中得到了凹面光栅实际的分辨率值。通过实验验证,实际检测结果与理论分析结果相差0.001 0~0.003 7nm,是一种能够真实反映凹面光栅分辨率的光学检测方法。
|
| 关 键 词： | 凹面光栅 分辨率 光源带宽 狭缝宽度 像素尺寸 |
| 收稿时间： | 2015/3/27 0:00:00 |
A study on the test method of the resolution of concave grating |
| |
| SU Yangqing,HUANG Yuanshen and YANG Haima.A study on the test method of the resolution of concave grating[J].Optical Instruments,2015,37(6):498-503. |
| |
| Authors: | SU Yangqing HUANG Yuanshen and YANG Haima |
| |
| Affiliation: | School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China and School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China |
| |
| Abstract: | In order to detect the resolution of the concave gratings, it needs to build a precise detection system. Based on the theoretical analysis of the system of the bandwidth of light source, the slit width and the pixel size of the detector, combining with the aberration analysis of concave gratings, a method for the resolution detection system is proposed. According to the standard method in JB/T 8239.2-95 which is named The technical conditions for diffraction grating, the system analyzes the above three factors quantitatively and puts forward a reasonable calculation method. Then it can obtain the practical value of concave grating resolution in the detection system. By experimental verification, the method can distinguish the difference between the test results and the theoretical analysis results from 0.0010 nm to 0.0037 nm. |
| |
| Keywords: | concave grating resolution light source bandwidth slit width pixel size |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《光学仪器》浏览原始摘要信息 |
|
点击此处可从《光学仪器》下载全文 |
|
