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光电高精度全场形位检测系统的研究
引用本文:张广军,刘惠彬.光电高精度全场形位检测系统的研究[J].光学仪器,1994,16(4):13-18.
作者姓名:张广军  刘惠彬
作者单位:北京航空航天大学!北京,100083,北京航空航天大学!北京,100083,北京航空航天大学!北京,100083,北京航空航天大学!北京,100083
摘    要:介绍了光电高精度全场形位检测系统。系统以面阵CCD作为被测物体边缘图象的探测器件,应用激光衍射和囹象处理技术进杆被测物体边缘的精确定位,实现了高精度全场形位检测。该系统具有测量速度快,检测精度高及数据处理自动化等特点。

关 键 词:全场形位  激光  衍射  CCD

The Study on the Optoelectric Measuring System for the Field of Shape and Position with High Precision
Zhang Guang-jun,Liu hui-bin,Luo xian-he,Li Xing-shan.The Study on the Optoelectric Measuring System for the Field of Shape and Position with High Precision[J].Optical Instruments,1994,16(4):13-18.
Authors:Zhang Guang-jun  Liu hui-bin  Luo xian-he  Li Xing-shan
Abstract:The optoelectric meating system for the field of chare and position with high ptecisionis described in this paper. The mcasuring system, using a plane scanning, the technique of laserdiffraction, and image processing, can realizes the msoement of the field of shape and position withhigh precision. It passesses the advantages of high precision and fast on-line measurement. It can also handle the data automatically.
Keywords:Field of Shape and Position  Laser  Diffraction  CCD  
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