| 共溅射制备WxSi1-x/Si多层膜应力的实验研究 |
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| 引用本文： | 冀斌,张一志,朱京涛,吴文娟.共溅射制备WxSi1-x/Si多层膜应力的实验研究[J].光学仪器,2015,37(4):367-370. |
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| 作者姓名： | 冀斌 张一志 朱京涛 吴文娟 |
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| 作者单位： | 同济大学 物理科学与工程学院, 上海 200092,同济大学 物理科学与工程学院, 上海 200092,同济大学 物理科学与工程学院, 上海 200092,上海应用技术学院 理学院 201418 |
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| 基金项目： | 国家自然科学基金(11305104);大科学装置联合基金重点项目(U1432244) |
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| 摘 要： | 采用直流磁控溅射技术制备了周期厚度为27.5nm的W/Si多层膜,使用实时应力测量装置对其应力特性进行了研究。为降低膜层应力,采用W、Si共溅射技术制备WxSi1-x膜层替换W膜层,制备出WxSi1-x/Si多层膜,与W/Si多层膜的应力特性进行了比较研究。结果表明,W/Si多层膜为较大的压应力,测量值为-476.86 MPa,WxSi1-x/Si周期多层膜为较小的压应力,测量值为-102.84MPa。因此采用共溅射制备WxSi1-x代替W可以显著改善多层膜的应力特性。
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| 关 键 词： | 应力 多层膜 共溅射 磁控溅射 X射线 |
| 收稿时间： | 2014/12/8 0:00:00 |
Stress analysis of WxSi1-x/Si multilayer prepared by co-deposited magnetron sputtering |
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| JI Bin,ZHANG Yizhi,ZHU Jingtao and WU Wenjuan.Stress analysis of WxSi1-x/Si multilayer prepared by co-deposited magnetron sputtering[J].Optical Instruments,2015,37(4):367-370. |
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| Authors: | JI Bin ZHANG Yizhi ZHU Jingtao and WU Wenjuan |
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| Affiliation: | School of Physics Science and Engineering, Tongji University, Shanghai 200092, China,School of Physics Science and Engineering, Tongji University, Shanghai 200092, China,School of Physics Science and Engineering, Tongji University, Shanghai 200092, China and College of sciences, Shanghai Institute of Technology, Shanghai 201418, China |
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| Abstract: | W/Si multilayer film with periodic of 27.5 nm was fabricated by using DC magnetron sputtering technology. The stress property has been studied by using the real time stress measuremenmt instrument. To reduce the stress between the layers, WxSi1-x material made by W and Si co-deposited technology was used to replace W material, and finally the WxSi1-x/Si film was fabricated. A comparative study of stress property between WxSi1-x/Si film and W/Si film has been conducted. The result indicates that W/Si periodic multilayer film shows relatively larger compressive stress. The value is -476.86 MPa. WxSi1-x/Si periodic multilayer film shows relatively smaller compressive stress. The value is -102.84 MPa. Therefore, the replacement of W material by WxSi1-x material fabricated by co-deposited technology can significantly improve the stress of the multilayer film. |
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| Keywords: | stress multilayer co-deposited magnetron sputtering X-ray |
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