| 基于空间相移技术的平面干涉仪系统设计 |
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| 引用本文： | 严志云,沈琦,邬晔佳.基于空间相移技术的平面干涉仪系统设计[J].光学仪器,2009,31(1):77-80. |
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| 作者姓名： | 严志云 沈琦 邬晔佳 |
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| 作者单位： | 1. 同济大学,机械工程学院,上海,201804
2. 上海大学,机电工程与自动化学院,上海,200122 |
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| 摘 要： | 时域相移技术由于需要在时域采集多幅干涉图而只擅长用于静态检测。为改善测量的动态特性，现提出了基于空间相移技术的平面干涉仪系统。采用基于偏振干涉和光栅分光的单CCD成像空间相移系统设计方案，设计了具有折叠式布局特点的干涉仪光路系统，建立了系统机械结构三维模型，结构紧凑、调整方便，并运用四步相移算法进行了模拟试验后数据处理。结果表明，所设计系统能够满足动态测量要求。
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| 关 键 词： | 空间相移 光栅分光 偏振干涉 |
Design of plane interferometer based on spatial phase-shifting technology |
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| YAN Zhiyun,SHEN Qi,WU Yejia.Design of plane interferometer based on spatial phase-shifting technology[J].Optical Instruments,2009,31(1):77-80. |
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| Authors: | YAN Zhiyun SHEN Qi WU Yejia |
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| Affiliation: | YAN Zhiyun, SHENQi2, WU Yejia (1. School of Mechanical Engineering, Tongji University, Shanghai 201804, China; 2. School of Mechanical-Electronic Engineering and Automatization, Shanghai University, Shanghai 200122, China) |
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| Abstract: | Temporal phase-shifting technology is only adept in static measurement because it has to collect some interference patterns in temporal field.In order to improve quality of dynamic measurement,a plane interferometer based on spatial phase-shifting technology is presented.The interferometer adopts the design plan which a spatial phase-shifting system of based on polarization interference and grating split beam and single CCD imaging is used.The optical system with the characteristics of foldaway layout is design considering structure in compact and adjustment in ease and the 3D model of the optical-mechanical system is built.Simulation test is performed by four-step phase-shifting method.The result shows good agreement with the requirements of dynamic measurement. |
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| Keywords: | spatial phase-shifting grating split beam polarization interference |
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