An Acousto-Optic Vibrometer for Measurement of Vibration in Ultra-Precision Machine Tools |
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Authors: | BKA Ngoi K Venkatakrishnan |
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Affiliation: | (1) Precision Engineering Strategic Research Group, School of Mechanical and Production Engineering, Nanyang Technological University, Nanyang, Singapore, SG |
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Abstract: | Measurement of vibration is a vital factor that limits the precision and accuracy of machining of micro and macro components.
In this paper, a novel technique for measurement of vibration is proposed using an acousto-optic modulator, which highlights
an improved approach in measuring vibration in the subnanometre range. An experimental comparison was made with a laser Doppler
vibrometer. This novel concept is proposed for application to a precision machine tool to measure the vibration on the machine
bed induced during the machining process and by the external environment, which can be compensated for by in-process techniques.
This novel measurement technique can also be applied for the precision measurement of the stage movement in ultra-precision
machines to a subnanometre resolution. |
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Keywords: | :Acousto-optic modulator (AOM) Acoustic wave Bragg cell Difraction grating Laser Doppler vibrometer |
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