时栅位移传感器在构造场中的耦合特性研究

为了进一步溯源时栅位移传感器磁场耦合过程引起的误差，对时栅位移传感器在构造场中的耦合特性进行研究，并研制了一种基于指数形平面线圈结构的新型直线时栅位移传感器。建立传感器工程构造磁场的数学模型，分析传感器耦合间隙对线圈耦合平面磁场分布的影响，研究不同形状平面线圈的耦合特性；根据传感器的耦合特性，构建了一种新型直线时栅位移传感器测量模型，对该模型进行了电磁场有限元仿真和仿真误差分析，得出该结构最佳感应间隙为0.4 mm;对传感器的结构误差进行了溯源分析，进一步优化传感器的结构；搭建实验平台，利用双层PCB绕线工艺加工传感器定尺和动尺，对优化前后的传感器样机开展对比实验。实验结果表明，设计的基于指数形平面线圈结构的新型直线时栅位移传感器可以有效抑制传感器的四次误差，新研制的传感器样机的原始测量精度在原有的基础上提高了45.8%。

Study on the coupling characteristics of time-grating displacement sensors in the structural field

To further trace the error caused by the magnetic field coupling process of the time-gate displacement sensor, the coupling characteristics of the time-gate displacement sensor in the construction field are studied. A new linear time-gate displacement sensor based on the exponential planar coil structure is developed. The mathematical model of the magnetic field constructed by sensor engineering is formulated. The influence of the sensor coupling gap on the magnetic field distribution of the coil coupling plane is analyzed, and the coupling characteristics of the coil of different shapes are studied. According to the coupling characteristics of the sensor, a new linear time-gate displacement sensor measurement model is formulated. The electromagnetic field finite element simulation and simulation error analysis are carried out on the model, and the optimal sensing gap of the structure is 0. 4 mm. The structural error of the sensor is traced and analyzed, and the structure of the sensor was further optimized. An experimental platform is established by using the double-layer PCB winding process to process sensor fixed and moving ruler. Comparative experiments are implemented on sensor prototypes before and after optimization. The experimental results show that the new linear time-gate displacement sensor based on exponential plane coil structure can effectively suppress the four errors of the sensor, and the original measurement accuracy of the newly developed sensor prototype is improved by 45. 8% on the original basis.